Lowtemperatureoxide

Thermaloxidationofsiliconisusuallyperformedatatemperaturebetween800and1200°C,resultinginsocalledHighTemperatureOxidelayer(HTO).Itmay ...,由FPFehlner著作·1970·被引用709次—Low-temperatureoxidationisareaction,occurringatorbelowroomtemperature,betweenasolidandagas.Itusuallyinvolvesthecombination.,,Commonnamesincludesiliconoxide,silicondioxide,silica,SiO2,HTO(hightemperatureoxide),LTO(lowtemperatur...

參考資訊如下
Thermal oxidation

Thermal oxidation of silicon is usually performed at a temperature between 800 and 1200 °C, resulting in so called High Temperature Oxide layer (HTO). It may ...

Low

由 FP Fehlner 著作 · 1970 · 被引用 709 次 — Low-temperature oxidation is a reaction, occurring at or below room temperature, between a solid and a gas. It usually involves the combination.

Low-temperature oxidation

Silicon dioxide

Common names include silicon oxide, silicon dioxide, silica, SiO2, HTO (high temperature oxide), LTO (low temperature oxide). The growth and deposition ...

Low-Temperature Fabrication (≤150 °C) of High

由 T Seo 著作 · 2020 · 被引用 14 次 — Low-Temperature Fabrication (≤150 °C) of High-Quality Sputtered Silicon Oxide Thin Film with Hydrogen Plasma Treatment. Taewon Seo.

Low

由 Y Zhang 著作 · 2021 · 被引用 22 次 — In summary, we demonstrate that a low-temperature MGZO/Ag/MGZO multilayer film fabricated by reactive plasma deposition (for oxides) and ...

LPCVD deposition of silicon oxide in a tube furnace

Thermal oxide deposition is almost always carried out at low pressure (LPCVD). There are several established methods: In the LTO process (low temperature oxide) ...

Low temperature formation of silicon oxide

由 WB Glendinning 著作 · 1973 · 被引用 1 次 — Silicon oxide films have been formed at temperatures as low as 25°C, using a reaction of Si with a vapor mixture containing either NO, HF and H2O or NO, HF, ...

The growth of ultrathin oxides of silicon by low temperature ...

由 VK Bhat 著作 · 1999 · 被引用 14 次 — The aim of the present study was to grow ultrathin oxides of silicon by a low temperature wet oxidation technique by varying the water vapor pressure, the ...